Title: Prof. Dr.Department: Electrical & Electronics Engineering DepartmentPosition: Academic StaffEmail: fethi.olcaytug@yeditepe.edu.trTelephone: 0 216 578 37 33Office: A-611Time: Full TimeAkademikResumeResearch Interest: :Microelectronics and Microsystem Technology Processes, Low Pressure Plasma Processes and Process Devices, Sensors Carbon Nano Structures Projects: Avusturya , Almanya ve Türkiye toplam sayı 11 Projeler toplam tutarı ca. 2,5 Mio EUR (1986 - 2012)