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Course Code: 
ME 462
Course Type: 
Area Elective
Theoric: 
3
Practice: 
0
Credits: 
3
ECTS: 
5
Course Language: 
English
Course Content: 

An overview of microfabrication methods: Thin-film deposition, lithography, oxidation, bulk and surface micromachining. MEMS (microelectromechanical systems) foundry processes. Review of basic MEMS governing equations in mechanical, electrical and thermal domain. Design, analysis and characterization of basic MEMS devices.

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